HQ:DPER-XSC11

Probe

  • 8 nm
  • 8 nm
  • < 20 nm
  • 40°
  • 12 - 18 µm
  • n-type silicon
  • 0.01 - 0.025 Ohm*cm
  • Platinum
  • Platinum

Cantilever



DPER-XSC11,
Cantilevers
Resonance Frequency, kHz Force Constant, N/m Length
l ± 5,
µm
Width
w ± 3,
µm
Thickness
t ± 0.5,
µm
min typ max min typ max
Cantilever A 12 15 18 0.1 0.2 0.4 500 30 2.7
Cantilever B 60 80 100 1.1 2.7 5.6 210 30 2.7
Cantilever C 115 155 200 3 7 16 150 30 2.7
Cantilever D 250 350 465 17 42 90 100 50 2.7
*The full cone angle may be less than 40° at the last 200 nm of the tip end.

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