The DPER probes are made by depositing a thin Pt coating on Si tips. While the thickness of the coating on the flat cantilever surface is about 15 nm, there is only a slight 4-5 nm increase of the tip di-mensions compared to the bare Si probes.

The DPE probe consists of a Silicon tip and a special structure of conductive layers, which provides a more stable electrical signal and less noise. Because of the increase in tip radius, some reduction of resolution in the topography image is possible when using DPE probes in comparison with bare silicon probes.

Probes with conductive wear-resistant 15 nm Pt coating on tip side with excellent bonding to the Sillicon probe. Resulting tip radius is about 25 nm. Cantilever backside may have optional Al reflective coating.

Probes with overall conductive chemically inert 10-nm Pt coating with 20-nm Ti sublayer on the tip and back side of the cantilever. Resulting probe tip radius is about 40 nm. Cantilever bending withing 3° is possible.

Probes with overall conductive chemically inert 20-nm Au coating with 20-nm Cr sublayer on the tip and back side of the cantilever. Resulting tip radius is about 50 nm. The coating may cause cantilever bending withing 3°.