CSC17/Cr-Au

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Probe
SEM image of uncoated silicon SPM probe tip
Silicon etched probe tip of the CSC series has a conical shape.

Typical probe tip radius of uncoated tip
10 nm

Full tip cone angle*
40°

Tip aspect ratio
more than 3:1 (4:1 typical)

Total tip height
20..25 µm

Probe material
n-type silicon (phosphorus doped)

Probe bulk resistivity
0.01..0.05 Ohm*cm

*The full cone angle may be less than 40° at the last 200 nm of the tip end.
Cantilever
SEM image of Silicon cantilever and probe. Schematic drawing of the probe chip.
Cantilever Resonant Frequency, kHz Spring Constant, N/m Length
l ± 5,
µm		 Width
w ± 3,
µm		 Thickness
t ± 0.5,
µm
min typ max min typ max
17 Series 8.5 12 15 0.05 0.15 0.3 460 50 2.0
Coating

Cr-Au coating is formed as a 20-nm Au film with a 20-nm Cr sublayer, which is deposited for better adhesion of Au. The coating is formed on both tip side and backside of the cantilever.

Resulting tip radius with the coating
50.0 nm
 
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