CSC17-F

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Probe



SEM image of uncoated silicon SPM probe tip

Silicon etched probe tip of the CSC series has a conical shape. Typical probe tip radius of uncoated tip 10 nm Full tip cone angle* 40° Total tip height 20..25 µm Probe material n-type silicon (phosphorus doped) Probe bulk resistivity 0.01..0.05 Ohmcm The full cone angle may be less than 40° at the last 200 nm of the tip end.

Cantilever



SEM image of Silicon cantilever and probe.		Schematic drawing of the probe chip.

Cantilever	Resonant Frequency, kHz			Spring Constant, N/m			Length l ± 5, µm	Width w ± 3, µm	Thickness t ± 0.5, µm
Cantilever	min	typ	max	min	typ	max	Length l ± 5, µm	Width w ± 3, µm	Thickness t ± 0.5, µm
17 Series	8.5	12	15	0.05	0.15	0.3	460	50	2.0


Pre-measured spring Constant
The spring constants of the cantilevers are individually measured at the facility using the non-destructive method of force constant determination based on the analysis of cantilever oscillation damping in liquids developed by John E. Sader, Univ. of Melbourne (* Rev.Sci.Instrum., 70, 3967 (1999)). Uncertainty of the calibrated force constant value shown in the individual cantilever specification is about 10%.

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