CSC37

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Probe
SEM image of uncoated silicon SPM probe tip
Silicon etched probe tip of the CSC series has a conical shape.

Typical probe tip radius of uncoated tip
10 nm

Full tip cone angle*
40°

Tip aspect ratio
more than 3:1 (4:1 typical)

Total tip height
20..25 µm

Probe material
n-type silicon (phosphorus doped)

Probe bulk resistivity
0.01..0.05 Ohm*cm

*The full cone angle may be less than 40° at the last 200 nm of the tip end.
Cantilevers
SEM image of 3 cantilevers (A, B, C) on chip of the CSC37 series. Schematic drawing of the probe chip.
CSC37,
Cantilevers
 Resonant Frequency, kHz Spring Constant, N/m Length
l ± 5,
µm		 Width
w ± 3,
µm		 Thickness
t ± 0.3,
µm
min typ max min typ max
A 33 41 49 0.35 0.65 1.2 250 35 2.0
B 17 21 24 0.1 0.3 0.4 350
C 23 28 34 0.2 0.35 0.7 300
 
Backside Al-coated.
15 chips. View price
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No backside coating.
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