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CSC38

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Probe



SEM image of uncoated silicon SPM probe tip

Silicon etched probe tip of the CSC series has a conical shape. Typical probe tip radius of uncoated tip 10 nm Full tip cone angle* 40° Tip aspect ratio more than 3:1 (4:1 typical) Total tip height 20..25 µm Probe material n-type silicon (phosphorus doped) Probe bulk resistivity 0.01..0.05 Ohmcm The full cone angle may be less than 40° at the last 200 nm of the tip end.

Cantilevers



SEM image of 3 cantilevers (A, B, C) on chip of the CSC38 series.		Schematic drawing of the probe chip.

CSC38, Cantilevers	Resonant Frequency, kHz			Spring Constant, N/m			Length l ± 5, µm	Width w ± 3, µm	Thickness t ± 0.3, µm
CSC38, Cantilevers	min	typ	max	min	typ	max	Length l ± 5, µm	Width w ± 3, µm	Thickness t ± 0.3, µm
A	14	20	28	0.02	0.08	0.2	250	35	1.0
B	7	10	14	0.01	0.03	0.08	350
C	9.5	14	19	0.01	0.05	0.1	300

Backside Al-coated.

15 chips.	View price

50 chips.	View price

No backside coating.

15 chips.	View price

50 chips.	View price

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