CSC11/Si3N4

ORDERING

Probe



SEM image of uncoated silicon SPM probe tip

Silicon etched probe tip of the CSC series has a conical shape. Typical probe tip radius of uncoated tip 10 nm Full tip cone angle* 40° Tip aspect ratio more than 3:1 (4:1 typical) Total tip height 20..25 µm Probe material n-type silicon (phosphorus doped) Probe bulk resistivity 0.01..0.05 Ohmcm The full cone angle may be less than 40° at the last 200 nm of the tip end.

Cantilevers



SEM image of triangular cantilever of the CSC11 series.		Schematic drawing of the probe chip.

CSC11 Cantilevers	Resonant Frequency, kHz			Spring Constant, N/m			Length l ± 5, µm	Width w ± 3, µm	Thickness t ± 0.3, µm
CSC11 Cantilevers	min	typ	max	min	typ	max	Length l ± 5, µm	Width w ± 3, µm	Thickness t ± 0.3, µm
A	20	28	40	0.1	0.35	0.9	200	40	1.0
B	100	155	235	1.5	6.0	16.5	90	40


Coating

Si3N4 coating is applied to both sides of the the cantilevers. The thickness of the coating is 10 nm. Si₃N₄ is a chemically inert and more hydrophobic than Si with natural oxide layer. Resulting tip radius with the coating 20 nm

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