CSC12/Tipless

ORDERING
Cantilevers
SEM image of 3 tipless cantilevers on chip of the 12th series. Schematic drawing of the probe chip.

Cantilever material
n-type silicon (phosphorus doped)

Cantilever bulk resistivity*
0.01..0.05 Ohm*cm

*The surface of Silicon has a native oxide layer that makes the cantilever nonconducting. The thickness of the native oxide film is 1..4 nm.
CSC12
Cantilevers
 Resonant Frequency, kHz Spring Constant, N/m Length
l ± 5,
µm		 Width
w ± 3,
µm		 Thickness
t ± 0.5,
µm
min typ max min typ max
A 65 105 150 0.25 0.95 2.5 110 35 1.0
B 95 155 230 0.45 1.75 5.0 90
C 50 75 105 0.15 0.6 1.5 130
D 9.5 14 19 0.01 0.05 0.1 300
E 7 10 14 0.01 0.03 0.08 350
F 14 20 28 0.02 0.08 0.2 250
 
Backside Al-coated.
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No backside coating.
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50 chips. View price
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