CSC21/Cr-Au

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Probe
SEM image of uncoated silicon SPM probe tip
Silicon etched probe tip of the CSC series has a conical shape.

Typical probe tip radius of uncoated tip
10 nm

Full tip cone angle*
40°

Tip aspect ratio
more than 3:1 (4:1 typical)

Total tip height
20..25 µm

Probe material
n-type silicon (phosphorus doped)

Probe bulk resistivity
0.01..0.05 Ohm*cm

*The full cone angle may be less than 40° at the last 200 nm of the tip end.
Cantilevers
SEM image of triangular cantilever of the CSC21 series. Schematic drawing of the probe chip.
CSC21
Cantilevers
 Resonant Frequency, kHz Spring Constant, N/m Length
l ± 5,
µm		 Width
w ± 3,
µm		 Thickness
t ± 0.5,
µm
min typ max min typ max
A 8 12 17 0.03 0.12 0.3 290 40 1.0
B 65 105 150 0.6 2.0 6.0 110
Coating

Cr-Au coating is formed as a 20-nm Au film with a 20-nm Cr sublayer, which is deposited for better adhesion of Au. The coating is formed on both tip side and backside of the cantilever.

Resulting tip radius with the coating
50.0 nm
 
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