DP14/LS

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Probe
SEM image of uncoated silicon SPM probe tip
Silicon etched probe tip of the NSC series has a conical shape.

Typical probe tip radius of uncoated tip
10 nm

Full tip cone angle*
40°

Tip aspect ratio
more than 3:1 (4:1 typical)

Total tip height
20..25 µm

Probe material
n-type silicon (phosphorus doped)

Probe bulk resistivity
0.01..0.05 Ohm*cm

*The full cone angle may be less than 40° at the last 200 nm of the tip end.
Cantilever
SEM image of Silicon cantilever and probe. Schematic drawing of the probe chip.
Cantilever Resonant Frequency, kHz Spring Constant, N/m Length
l ± 5,
µm		 Width
w ± 3,
µm		 Thickness
t ± 0.5,
µm
min typ max min typ max
14 Series 110 160 220 1.8 5.0 12.5 125 35 2.0
Probe
SEM image of LS probe tip end.
LS probe features high durability and lifetime due to special wear-resistant coating.

Typical probe tip radius
30 nm

Tip height
20..25 µm

Full tip cone angle
40°

Coating material
Wear-resistant, not conducting, chemically inert.
 
Backside Al-coated.
15 chips. View price
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50 chips. View price
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