DP16/HI'RES-C

ORDERING

Probe



SEM image of uncoated silicon SPM probe tip

Silicon etched probe tip of the NSC series has a conical shape. Typical probe tip radius of uncoated tip 10 nm Full tip cone angle* 40° Total tip height 20..25 µm Probe material n-type silicon (phosphorus doped) Probe bulk resistivity 0.01..0.05 Ohmcm The full cone angle may be less than 40° at the last 200 nm of the tip end.

Cantilever



SEM image of Silicon cantilever and probe.		Schematic drawing of the probe chip.

Cantilever	Resonant Frequency, kHz			Spring Constant, N/m			Length l ± 5, µm	Width w ± 3, µm	Thickness t ± 0.5, µm
Cantilever	min	typ	max	min	typ	max	Length l ± 5, µm	Width w ± 3, µm	Thickness t ± 0.5, µm
16 Series	150	170	190	25	40	60	230	40	7.0

Probe



TEM images of the Hi'RES-C probe and single extratip.

HI-RES probe has a hydrophobic diamond-like extratip at the apex of silicon etched probe. In general, there are additional smaller extratips near the main one. Typical probe tip radius 1 nm Height of extratip 100 .. 200 nm Total probe tip height 20..25 µm Maximum allowed height of surface feature for scanning < 20nm* *Though the extratips are of different height and angle, they can contribute to imaging of rough surfaces, which result in repeating of the features in the scan.

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