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DPE14

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Probe



TEM micrograph of the DPE probe tip end

Probes of the DPE series has a special structure of conducting layers applied to the tip that provides better signat to noise ratio on the scans of electric properties. Resulting tip radius with the coating 35 nm Full tip cone angle* 40° Total tip height 20..25 µm Probe bulk material n-type silicon (phosphorus doped). *The full cone angle may be less than 40° at the last 200 nm of the tip end.


Cantilever



SEM image of DPE cantilever and probe.		Schematic drawing of the probe chip.

Cantilever	Resonant Frequency, kHz			Spring Constant, N/m			Length l ± 5, µm	Width w ± 3, µm	Thickness t ± 0.5, µm
Cantilever	min	typ	max	min	typ	max	Length l ± 5, µm	Width w ± 3, µm	Thickness t ± 0.5, µm
14 Series	110	160	220	1.8	5.0	12.5	125	35	2.0


Backside coating

Cantilever backside is Al-coated.

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