The DPER probes are made by depositing a thin metal coating on Si tips. While the thickness of the
coating on the flat cantilever surface is about 20 nm, there is only slight 4-5 nm increase of the tip di-
mensions compared to the bare Si probes.
The tip radius of each DPER probe is individually controlled on SEM and is guaranteed to be below 20 nm.
Resulting tip radius with the coating
15 nm
Full tip cone angle*
30°
Total tip height
10..15 µm
Probe material
Si
Material of the tip
Pt-coated
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