NSC36/Co-Cr

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Probe



SEM image of uncoated silicon SPM probe tip

Silicon etched probe tip of the NSC series has a conical shape. Typical probe tip radius of uncoated tip 10 nm Full tip cone angle* 40° Tip aspect ratio more than 3:1 (4:1 typical) Total tip height 20..25 µm Probe material n-type silicon (phosphorus doped) Probe bulk resistivity 0.01..0.05 Ohmcm The full cone angle may be less than 40° at the last 200 nm of the tip end.

Cantilevers



SEM image of 3 cantilevers (A, B, C) on chip of the NSC36 series.		Schematic drawing of the probe chip.

NSC36, Cantilevers	Resonant Frequency, kHz			Spring Constant, N/m			Length l ± 5, µm	Width w ± 3, µm	Thickness t ± 0.3, µm
NSC36, Cantilevers	min	typ	max	min	typ	max	Length l ± 5, µm	Width w ± 3, µm	Thickness t ± 0.3, µm
A	65	105	150	0.25	0.95	2.5	110	35	1.0
B	95	155	230	0.45	1.75	5.0	90
C	50	75	105	0.15	0.6	1.5	130


Coating

The coating consists of a Co layer of about 60-nm thickness on the tip and backside of the cantilever. The Co layer is formed as a polycrystalline film, which allows steady permanent magnetization in the direction of the tip axis. All chips are pre-magnetized at the facility before shipping to end users. In some cases additional magnetization by an arbitrary strong magnet is required. The Co coating is protected from oxidation by a 20-nm Cr layer, resulting in longer cantilever performance. Resulting tip radius with the coating 90.0 nm

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