NSC36/Pt

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Probe
SEM image of uncoated silicon SPM probe tip
Silicon etched probe tip of the NSC series has a conical shape.

Typical probe tip radius of uncoated tip
10 nm

Full tip cone angle*
40°

Tip aspect ratio
more than 3:1 (4:1 typical)

Total tip height
20..25 µm

Probe material
n-type silicon (phosphorus doped)

Probe bulk resistivity
0.01..0.05 Ohm*cm

*The full cone angle may be less than 40° at the last 200 nm of the tip end.
Cantilevers
SEM image of 3 cantilevers (A, B, C) on chip of the 36th series. Schematic drawing of the probe chip.
36 Series,
Cantilevers
 Resonant Frequency, kHz Spring Constant, N/m Length
l ± 5,
µm		 Width
w ± 3,
µm		 Thickness
t ± 0.3,
µm
min typ max min typ max
A 65 105 150 0.25 0.95 2.5 110 35 1.0
B 95 155 230 0.45 1.75 5.0 90
C 50 75 105 0.15 0.6 1.5 130
Coating
TEM micrograph of the tip with 10-nm
thick wear-resistant Pt coating.
The conducting Pt coating is continuous from the tip end to the bulk of the
Silicon chip (tip side only).

Coating thickness
15 nm

Resulting tip radius
25 nm
 
Backside Al-coated.
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No backside coating.
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