NSC11/Ti-Pt

ORDERING

Probe



SEM image of uncoated silicon SPM probe tip

Silicon etched probe tip of the NSC series has a conical shape. Typical probe tip radius of uncoated tip 10 nm Full tip cone angle* 40° Tip aspect ratio more than 3:1 (4:1 typical) Total tip height 20..25 µm Probe material n-type silicon (phosphorus doped) Probe bulk resistivity 0.01..0.05 Ohmcm The full cone angle may be less than 40° at the last 200 nm of the tip end.

Cantilevers



SEM image of triangular cantilever of the NSC11 series.		Schematic drawing of the probe chip.

NSC11 Cantilevers	Resonant Frequency, kHz			Spring Constant, N/m			Length l ± 5, µm	Width w ± 3, µm	Thickness t ± 0.3, µm
NSC11 Cantilevers	min	typ	max	min	typ	max	Length l ± 5, µm	Width w ± 3, µm	Thickness t ± 0.3, µm
A	45	60	75	1.5	3.0	5.0	200	40	2.0
B	260	330	420	23	48	91	90	40


Coating

The Ti-Pt coating consists of a 10-nm Pt layer on a 20-nm Ti sublayer, which increases adhesion and electromigration firmness of Pt. The Ti-Pt coating is formed on both tip and reflective side of the cantilever. Resulting tip radius with the coating 40.0 nm.

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