NSC12/Tipless

ORDERING
Cantilevers
SEM image of 3 tipless cantilevers (A, B, C) on chip of the NSC12 series. Schematic drawing of the probe chip.

Cantilever material
n-type silicon (phosphorus doped)

Cantilever bulk resistivity*
0.01..0.05 Ohm*cm

*The surface of Silicon has a native oxide layer that makes the cantilever nonconducting. The thickness of the native oxide film is 1..4 nm.
NSC12
Cantilevers
 Resonant Frequency, kHz Spring Constant, N/m Length
l ± 5,
µm		 Width
w ± 3,
µm		 Thickness
t ± 0.5,
µm
min typ max min typ max
A 165 210 240 3.5 7.5 12.5 110 35 2.0
B 240 315 405 6.5 14.0 27.5 90
C 120 150 190 3.5 4.5 8.5 130
D 23 28 34 0.2 0.35 0.7 300
E 17 21 24 0.1 0.3 0.4 350
F 33 41 49 0.35 0.65 1.2 250
 
Backside Al-coated.
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No backside coating.
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