MikroMash - SPM Probes - 3-Lever - 36 Series

3-Lever

36 Series, Cantilevers

Options



SEM image of 3 cantilevers (A, B, C) on chip of the 36^th series.		Schematic drawing of the probe chip.

36-th Series, Canti-levers	Resonant Frequency, kHz			Spring Constant, N/m			Length l ± 5, µm	Width w ± 3, µm	Thickness t ± 0.3, µm
36-th Series, Canti-levers	min	typ	max	min	typ	max	Length l ± 5, µm	Width w ± 3, µm	Thickness t ± 0.3, µm
A	65	105	150	0.25	0.95	2.5	110	35	1.0
B	95	155	230	0.45	1.75	5.0	90
C	50	75	105	0.15	0.6	1.5	130

Probes

	Features 1-10 nm	Features more than 10 nm	EFM	MFM
NSC/CSC 10 nm
NSC/CSC 20 nm
Pt
Ti-Pt
Cr-Au
Co-Cr

general purpose
	Lateral resolution down to 5 nm for scan size below 1 μm. 10 nm radius conical tip NSC/CSC

long scanning
	Accurate resolution of surface features larger than 10 nm in diameter. Good for scan sizes above 3 μm at 512 points. 20 nm radius Si₃N₄ - coated Si probes NSC/CSC

Conductive
	Probes with special coatings for conductive AFM modes. 25 nm radius tip Pt coated 40 nm radius tip Ti-Pt coated 50 nm radius tip Cr-Au coated

magnetic
	Probes with magnetic coating for MFM. 90 nm radius magnetic tip Co-Cr coated

CONTACTS

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