MikroMash - SPM Probes - 3-Lever - 38 Series

3-Lever

38 Series, Cantilevers

Options



SEM image of 3 cantilevers (A, B, C) on chip of the 38^th series.		Schematic drawing of the probe chip.

38 Series, Cantilevers	Resonant Frequency, kHz			Spring Constant, N/m			Length l ± 5, µm	Width w ± 3, µm	Thickness t ± 0.3, µm
38 Series, Cantilevers	min	typ	max	min	typ	max	Length l ± 5, µm	Width w ± 3, µm	Thickness t ± 0.3, µm
A	14	20	28	0.02	0.08	0.2	250	35	1.0
B	7	10	14	0.01	0.03	0.08	350
C	9.5	14	19	0.01	0.05	0.1	300

Probes

	Features 1-10 nm	Features more than 10 nm	EFM
NSC/CSC 10 nm
NSC/CSC 20 nm
Pt
Ti-Pt
Cr-Au

general purpose
	Lateral resolution down to 5 nm for scan size below 1 μm. 10 nm radius conical tip NSC/CSC

long scanning
	Accurate resolution of surface features larger than 10 nm in diameter. Good for scan sizes above 3 μm at 512 points. 20 nm radius Si₃N₄ - coated Si probes NSC/CSC

Conductive
	Probes with special coatings for conductive AFM modes. 25 nm radius tip Pt coated 40 nm radius tip Ti-Pt coated 50 nm radius tip Cr-Au coated

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