|
The probe has a conical shape. The coating consists of a Co layer
of about 60-nm thickness on the tip and backside of the cantilever.
The Co layer is formed as a polycrystalline film, which allows steady
permanent magnetization in the direction of the tip axis. All chips
are pre-magnetized at the facility before shipping to end users.
In some cases additional magnetization by an arbitrary strong magnet
is required, e.g. SmCo or NdFeB.
The Co coating is protected from oxidation by a 20-nm Cr layer,
resulting in longer cantilever performance.
Resulting tip radius with the coating
90.0 nm
Coercitivity Hc of the coating
300..400 Oe.
Full tip cone angle
40°
Tip aspect ratio
more than 3:1 (4:1 typical)
Total tip height
20..25 µm
Probe bulk material
n-type silicon (phosphorus doped).
|