SPM Probes   Conductive  

Cr-Au coating

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Probe
The probe has a conical shape. The Cr-Au coating is formed as a 20-nm Au film with a 20-nm Cr sublayer, which is deposited for better adhesion of Au. The coating is formed on both tip side and backside of the cantilever.

Resulting tip radius with the coating
50.0 nm

Full tip cone angle*
40°

Tip aspect ratio
more than 3:1 (4:1 typical)

Total tip height
20..25 µm

Probe bulk material
n-type silicon (phosphorus doped).

*The full cone angle may be less than 40° at the last 200 nm of the tip end.
Cantilevers
Cantilever Resonant Frequency,
kHz		 Spring Constant,
N/m
min typical max mintypicalmax
15 Series 265 325 400 20 40 75
16 Series 150 170 190 25 40 60
14 Series 110 160 220 1.8 5 12.5
18 Series 75 100 125 2.0 3.5 5.5
19 Series 50 80 113 0.17 0.65 1.7
17 Series 8.5 12 15 0.05 0.15 0.3
1-lever

325 kHz (40 N/m)

15 Series

170 kHz (40 N/m)

16 Series

160 kHz (5 N/m)

14 Series

80 kHz (0.6 N/m)

19 Series

75 kHz (3.5 N/m)

18 Series

12 kHz (0.15 N/m)

17 Series
3-lever

150..320 kHz
(5..15 N/m)

35 Series

70..150 kHz
(0.6..1.8 N/m)

36 Series

20..40 kHz
(0.3..0.6 N/m)

37 Series

20..40 kHz
(0.03..0.08 N/m)

38 Series
triangular

330 kHz (48 N/m)
60 kHz (3.0 N/m)

NSC11

210 kHz (17 N/m)
25 kHz (1.0 N/m)

NSC21

155 kHz (6.0 N/m)
28 kHz (0.35 N/m)

CSC11

105 kHz (2.0 N/m)
12 kHz (0.12 N/m)

CSC21
 
 

 

 

 

 
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