SPM Probes   Materials Characterizing  

-F SERIES

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Silicon etched probes with pre-measured spring constant.
Probes
SEM image of uncoated silicon SPM probe tip SEM micrograph of Silicon etched probe
tip end.
Silicon etched probe tip of the NSC/CSC series has a conical shape.

Typical probe tip radius
10 nm

Full tip cone angle*
40°

Tip aspect ratio
more than 3:1 (4:1 typical)

Total tip height
20..25 µm

Probe material
n-type silicon (phosphorus doped)

Probe bulk resistivity**
0.01..0.05 Ohm*cm

*The full cone angle may be less than 40° at the last 200 nm of the tip end.
**The surface of Silicon has a native oxide layer that makes the probe nonconducting. The thickness of the native oxide film is 1..4 nm.
Cantilevers
The cantilevers are individually measured at the facility using nondestructive method of force constant determination. The technique is based on the analysis of cantilever oscillation damping in liquids developed by J. E. Sader (Univ. of Melbourne). The uncertainty of the calibrated value shown in the individual cantilever specifications is about 10 %.
Cantilever Resonant Frequency, kHz Spring Constant, N/m
min typical max mintypicalmax
15 Series 265 325 400 20 40 75
16 Series 150 170 190 25 40 60
14 Series 110 160 220 1.8 5 12.5
18 Series 75 100 125 2.0 3.5 5.5
19 Series 50 80 113 0.17 0.65 1.7
17 Series 8.5 12 15 0.05 0.15 0.3
1-lever

325 kHz (40 N/m)

15 Series

170 kHz (40 N/m)

16 Series

160 kHz (5 N/m)

14 Series

80 kHz (0.6 N/m)

19 Series

75 kHz (3.5 N/m)

18 Series

12 kHz (0.15 N/m)

17 Series
 
 

 

 

 

 
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