SPM Probes   Conductive  

Pt coating

Options

Probe
TEM micrograph of the tip with 10-nm thick wear-resistant Pt coating  
The probe has a conical shape. The conducting 15-nm thick Pt coating is continuous from the tip end to the bulk of the Silicon chip.

Resulting tip radius with the coating
25 nm

Full tip cone angle*
40°

Tip aspect ratio
more than 3:1 (4:1 typical)

Total tip height
20..25 µm

Probe bulk material
n-type silicon (phosphorus doped).

*The full cone angle may be less than 40° at the last 200 nm of the tip end.

Application

AFM is capable of mapping different electric properties of materials to topography images. These data can be used for analysis of the structure and composition of heterogeneous samples as well as for quantitative characterization of individual grains or defects on surface.

Electric properties of a sample can be mapped using probes with conducting coatings, when AC or DC bias is applied between the tip and the sample. Contact mode or two-pass operation technique can be used for this purpose.

         Scans and application notes ?»

Cantilevers
Cantilever Resonant Frequency,
kHz
Spring Constant,
N/m
min typical max mintypicalmax
15 Series 265 325 400 20 40 75
16 Series 150 170 190 25 40 60
14 Series 110 160 220 1.8 5 12.5
18 Series 75 100 125 2.0 3.5 5.5
19 Series 50 80 113 0.17 0.65 1.7
17 Series 8.5 12 15 0.05 0.15 0.3
1-lever

325 kHz (40 N/m)

15 Series

170 kHz (40 N/m)

16 Series

160 kHz (5 N/m)

14 Series

80 kHz (0.6 N/m)

19 Series

75 kHz (3.5 N/m)

18 Series

12 kHz (0.15 N/m)

17 Series

3-lever

150..320 kHz
(5..15 N/m)

35 Series

70..150 kHz
(0.6..1.8 N/m)

36 Series

20..40 kHz
(0.3..0.6 N/m)

37 Series

20..40 kHz
(0.03..0.08 N/m)

38 Series

triangular

330 kHz (48 N/m)
60 kHz (3.0 N/m)

NSC11

210 kHz (17 N/m)
25 kHz (1.0 N/m)

NSC21

155 kHz (6.0 N/m)
28 kHz (0.35 N/m)

CSC11

105 kHz (2.0 N/m)
12 kHz (0.12 N/m)

CSC21

 
 

 

 

 

 
CONTACTS
MIKROMASCH

TOLL-FREE NUMBERS: USA: 1-866-SPMTIPS (776-8477)/ EU: + 8000-SPMTIPS (776-8477)
E-MAIL: INFO@MIKROMASCH.COM