The probe has a conical shape. The conducting
15-nm thick Pt coating is continuous from the tip end to the bulk
of the Silicon chip.
Resulting tip radius with the coating
25 nm.
Full tip cone angle*
40°
Total tip height
20..25 µm
Probe bulk material
n-type silicon (phosphorus doped).
*The full cone angle may be less than 40° at
the last 200 nm of the tip end.
|
