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SCD17

Probe
SCD probe
SEM image of SCD probe tip.
The probe tip is a single crystal diamond pyramid, which is mounted on silicon cantilever. The technology provides tips a high aspect ratio apex. The cone angle is less than 20° over the top 100 - 200 nm.

Typical probe tip radius
7 nm

Tip cone angle
20°

Tip height
5 - 10 µm

Probe material
Diamond

The probe is not conducting, hydrophobic, chemically inert.
Cantilever
SEM image of the Silicon cantilever with the Diamond tip mounted on its end. Schematic drawing of the probe chip.
Cantilever Resonant Frequency, kHz Spring Constant, N/m Length
l ± 5,
µm		 Width
w ± 3,
µm		 Thickness
t ± 0.5,
µm
min typ max min typ max
17 Series 8.5 12 15 0.05 0.15 0.3 460 50 2.0

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Backside Al-coated.
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