SPM Probes   Conductive  

Ti-Pt coating

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Probe
The probe has a conical shape. The Ti-Pt coating consists of a 10-nm Pt layer on a 20-nm Ti sublayer, which increases adhesion and electromigration firmness of Pt. The Ti-Pt coating is formed on both tip and reflective side of the cantilever.

Resulting tip radius with the coating
40.0 nm.

Full tip cone angle*
40°

Tip aspect ratio
more than 3:1 (4:1 typical)

Total tip height
20..25 µm

Probe bulk material
n-type silicon (phosphorus doped).

*The full cone angle may be less than 40° at the last 200 nm of the tip end.
Cantilevers
Cantilever Resonant Frequency,
kHz		 Spring Constant,
N/m
min typical max mintypicalmax
15 Series 265 325 400 20 40 75
16 Series 150 170 190 25 40 60
14 Series 110 160 220 1.8 5 12.5
18 Series 75 100 125 2.0 3.5 5.5
19 Series 50 80 113 0.17 0.65 1.7
17 Series 8.5 12 15 0.05 0.15 0.3
1-lever

325 kHz (40 N/m)

15 Series

170 kHz (40 N/m)

16 Series

160 kHz (5 N/m)

14 Series

80 kHz (0.6 N/m)

19 Series

75 kHz (3.5 N/m)

18 Series

12 kHz (0.15 N/m)

17 Series
3-lever

150..320 kHz
(5..15 N/m)

35 Series

70..150 kHz
(0.6..1.8 N/m)

36 Series

20..40 kHz
(0.3..0.6 N/m)

37 Series

20..40 kHz
(0.03..0.08 N/m)

38 Series
triangular

330 kHz (48 N/m)
60 kHz (3.0 N/m)

NSC11

210 kHz (17 N/m)
25 kHz (1.0 N/m)

NSC21

155 kHz (6.0 N/m)
28 kHz (0.35 N/m)

CSC11

105 kHz (2.0 N/m)
12 kHz (0.12 N/m)

CSC21
 
 

 

 

 

 
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