MikroMasch - SPM Probes - Materials Characterizing - Tipless

Materials Characterizing

Tipless cantilevers

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SEM image of 3 tipless cantilevers on chip of the 12^th series.		Schematic drawing of the probe chip.

CSC12 Cantilevers	Resonant Frequency, kHz			Spring Constant, N/m			Length l ?± 5, ?µm	Width w ?± 3, ?µm	Thickness t ?± 0.3, ?µm
CSC12 Cantilevers	min	typ	max	min	typ	max	Length l ?± 5, ?µm	Width w ?± 3, ?µm	Thickness t ?± 0.3, ?µm
A	65	105	150	0.25	0.95	2.5	110	35	1.0
B	95	155	230	0.45	1.75	5.0	90
C	50	75	105	0.15	0.6	1.5	130
D	9.5	14	19	0.01	0.05	0.1	300
E	7	10	14	0.01	0.03	0.08	350
F	14	20	28	0.02	0.08	0.2	250

NSC12 Cantilevers	Resonant Frequency, kHz			Spring Constant, N/m			Length l ?± 5, ?µm	Width w ?± 3, ?µm	Thickness t ?± 0.3, ?µm
NSC12 Cantilevers	min	typ	max	min	typ	max	Length l ?± 5, ?µm	Width w ?± 3, ?µm	Thickness t ?± 0.3, ?µm
A	165	210	240	3.5	7.5	12.5	110	35	2.0
B	240	315	405	6.5	14.0	27.5	90
C	120	150	190	3.5	4.5	8.5	130
D	23	28	34	0.2	0.35	0.7	300
E	17	21	24	0.1	0.3	0.4	350
F	33	41	49	0.35	0.65	1.2	250

6-lever


	10..150 kHz (0.03..2.0 N/m)	CSC12

	20..320 kHz (0.3..15 N/m)	NSC12

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