MikroMash - SPM Probes - Triangular - CSC11

CSC11 Series, Cantilevers

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SEM image of triangular cantilever of the CSC11 series.		Schematic drawing of the probe chip.

CSC11 Cantilevers	Resonant Frequency, kHz			Spring Constant, N/m			Length l ± 5, µm	Width w ± 3, µm	Thickness t ± 0.3, µm
CSC11 Cantilevers	min	typ	max	min	typ	max	Length l ± 5, µm	Width w ± 3, µm	Thickness t ± 0.3, µm
A	20	28	40	0.1	0.35	0.9	200	40	1.0
B	100	155	235	1.5	6.0	16.5	90	40

Probes

	Features 1-10 nm	Features more than 10 nm	EFM
NSC/CSC 10 nm
NSC/CSC 20 nm
Pt
Ti-Pt
Cr-Au

general purpose
	Lateral resolution down to 5 nm for scan size below 1 μm. 10 nm radius conical tip NSC/CSC

long scanning
	Accurate resolution of surface features larger than 10 nm in diameter. Good for scan sizes above 3 μm at 512 points. 20 nm radius Si₃N₄ - coated Si probes NSC/CSC

Conductive
	Probes with special coatings for conductive AFM modes. 25 nm radius tip Pt coated 40 nm radius tip Ti-Pt coated 50 nm radius tip Cr-Au coated

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