MikroMash - SPM Probes - Triangular - CSC21

CSC21 Series, Cantilevers

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SEM image of triangular cantilever of the CSC21 series.		Schematic drawing of the probe chip.

CSC21 Cantilevers	Resonant Frequency, kHz			Spring Constant, N/m			Length l ± 5, µm	Width w ± 3, µm	Thickness t ± 0.3, µm
CSC21 Cantilevers	min	typ	max	min	typ	max	Length l ± 5, µm	Width w ± 3, µm	Thickness t ± 0.3, µm
A	8	12	17	0.03	0.12	0.3	290	40	1.0
B	65	105	150	0.6	2.0	6.0	110	40	1.0

Probes

	Features 1-10 nm	Features more than 10 nm	EFM	MFM
NSC/CSC 10 nm
NSC/CSC 20 nm
Pt
Ti-Pt
Cr-Au
Co-Cr

general purpose
	Lateral resolution down to 5 nm for scan size below 1 μm. 10 nm radius conical tip NSC/CSC

long scanning
	Accurate resolution of surface features larger than 10 nm in diameter. Good for scan sizes above 3 μm at 512 points. 20 nm radius Si₃N₄ - coated Si probes NSC/CSC

Conductive
	Probes with special coatings for conductive AFM modes. 25 nm radius tip Pt coated 40 nm radius tip Ti-Pt coated 50 nm radius tip Cr-Au coated

magnetic
	Probes with magnetic coating for MFM. 90 nm radius magnetic tip Co-Cr coated

CONTACTS

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