The TGF calibration gratings feature one-dimensional arrays of trapezoidal steps etched into a silicon substrate. The sidewalls of the structures are very smooth and planar surfaces with well-defined orientation formed by the (111) crystallographic planes in monocrystalline silicon. The sidewalls and the horizontal top surfaces form an angle of 54°74’.
|Part number||Pitch||Edge angle
||Active area, mm||Step height, µm*
||Chip dimensions, mm|
|Value, µm||Accuracy, µm|
||3x3||1.75||5 x 5 x 0.3|
* Approximate value, not for vertical calibration purposes