MikroMash - Test structures

Porous aluminum

For characterization of tip shape with a periodic pore structure. The radius of curvature at the spike-like intersection of the pore walls is 2 - 4 nm.

PA01

TGG Series
	Calibration grating with triangular steps for tip characterization in contact mode and for lateral calibration. TGG01

TGF Series

Silicon grating with trapezoidal steps for calibration using the slope angle, which is maintained with high accuracy.

TGF11

tgx series

Silicon gratings with undercut edges for lateral calibration of SPM.
3 µm pitch	TGX01
10 µm pitch	TGX11

tgz series

Grating with rectangular silicon oxide steps for vertical calibration of SPM.
20 nm height	TGZ01
100 nm height	TGZ02
500 nm height	TGZ03
1 µm height	TGZ04
1.5 µm height	TGZ11

HOPG

Highly ordered pyrolithic graphite with atomically flat areas on the surface.
0.8° mosaic spread	ZYA
1.2° mosaic spread	ZYB
3.5° mosaic spread	ZYH

Sets of test structures

TGS01

TGS02

TGS03

TGZ01 (step height 20 nm)
TGZ02 (step height 100 nm)
TGZ03 (step height 500 nm)

PA01 (porous Aluminum)
TGX01 (3 µm pitch, undercut edges)
TGG01 (3 µm pitch, triangular steps)
TGZ01 (step height 20 nm)
TGZ02 (step height 100 nm)
TGZ03 (step height 500 nm)

PA01 (porous Aluminum)
TGX01 (3 µm pitch, undercut edges)
TGG01 (3 µm pitch, triangular steps)

TGS01C

TGS02C

TGZ01 (step height 20 nm), NIST-traceable
TGZ02 (step height 100 nm), NIST-traceable
TGZ03 (step height 500 nm), NIST-traceable

TGZ01 (step height 20 nm), NIST-traceable
TGZ02 (step height 100 nm), NIST-traceable
TGZ03 (step height 500 nm), NIST-traceable
PA01 (porous Aluminum)
TGX01 (3 µm pitch, undercut edges)
TGG01 (3 µm pitch, triangular steps)

CONTACTS

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