TGG01

Tip Characterization Grating
SEM image of TGG01 grating

The TGG01 series of silicon calibration gratings is a 1-D array of triangular steps having precise linear and angular dimensions defined by the crystallography of Silicon (<111> plane) and maintained with high accuracy. The edges of the triangular steps have curvature radii less than 10nm.
Schematic of TGG01 gratings.
Part Number Pitch Step height*, µm Active area, mm Chip dimensions, mm
Value, µm Accuracy
TGG01 3.0 ±5nm 1.8 3 x 3 5 x 5 x 0.45
*The step height value is given for information only, not for vertical calibration purposes.
Application

You can use the TGG01 grating for 2-D tip characterization in contact mode, especially for cantilevers with a high force constant. The triangular steps of the TGG01 grating are much more robust than the spikes of PA01.

The TGG01 calibration grating is also useful for:

• lateral calibration of SPM scanners;
• detection of lateral and vertical scanner nonlinearity;
• detection of angular distortions.

For accurate quantification of images of the calibration gratings from the TGG01 series, you can use the Scanning Probe Image Processor (SPIP) designed by Image Metrology.
 
Image of TGG01 grating and cross-section  

Calibration grating of the TGG01 series is also included in TGS02, TGS02C, and TGS03 sets.

ORDERING

 
Single
TGG01 grating View price
 
Calibration set
TGS02 View price
TGS03 View price
TGS02, TGZ are NIST-traceable View price
 
 

 

 

 

 
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