Calibration gratings and test structures may be purchased in sets at a disconted price. There are a number of sets for different purposes.

The TGS01 is for vertical calibration only, and the TGS01C makes the calibration traceable to NIST. The TGS02 is the most complete set of gratings and test structures that allows lateral calibration, vertical calibration and tip characterization. Similar to the TGS01C, the TGS02C makes the vertical calibration traceable to NIST. TGS03 is for tip characterization and lateral calibration only.