TGX Series

Grating for lateral calibration
SEM image of TGX grating

The silicon calibration grating from the TGX series is a chessboard-like array of square pillars with sharp undercut edges formed by the (110) crystallographic planes of silicon. The typical radius of the edges is less than 5 nm.
Schematic of TGX gratings.

The pitch of the TGX01 grating is certified at the Danish Institute of Fundamental Metrology (DFM certificate number N0301). MikroMasch guarantees the pitch uncertainty of TGX01 gratings within ±0.25% nm. Every grating can be certified individually in DFM at an additional cost.
Part Number Pitch Step Height, µm* Active area, mm Chip dimensions, mm
Value, µm Accuracy
TGX01 3.0 ±8 nm 1.0 2 x 2 5 x 5 x 0.45
TGX11 10.0 ±0,25% 2.0
*The step height value is given for information only, not for vertical calibration purposes.
Application

TGX calibration gratings are intended for lateral calibration of SPM scanners. You can also use the gratings for:

• detection of lateral non-linearity, hysteresis, creep, and cross-coupling effects;
• determination of the tip aspect ratio.

For accurate quantification of images of calibration gratings from the TGX series, we recommend using the Scanning Probe Image Processor (SPIP) designed by Image Metrology.

An example of lateral non-linearity correction by a calibration grating from the TGX01 series is shown below.
20x20µm image of TGX01 grating before the correction of nonlinearity. The same area after the software correction of nonlinearity.

Calibration grating of the TGX01 series is also included in TGS02, TGS02C, and TGS03 sets.

ORDERING

 
Single
TGX01, 3 µm pitch View price
TGX11, 10 µm pitch View price
 
Calibration set
TGS02 View price
TGS03 View price
TGS02, TGZ are NIST-traceable View price
*If you need other sizes or thicknesses, feel free to ask us.
 
 

 

 

 

 
 
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