TGZ Series

Grating for vertical calibration
SEM image of TGZ grating

Calibration gratings from the TGZ series are 1-D arrays of rectangular SiO2 steps on a Si wafer. The structure is coated by Si3N4 to protect the Si from oxidation. The step height value is calibrated over the whole active area.

The actual step height, shown in the individual specifications, may differ slightly from the nominal value. Step height accuracy is the standard deviation calculated over the whole active area. It indicates the deviation from the actual step height value shown in the individual specifications.
Schematic of TGZ gratings.
Part Number Step Height Pitch, µm* Active area, mm Chip dimensions, mm
Range, nm Accuracy
TGZ01 18..26 ±1 nm 3.0 3 x 3 5 x 5 x 0.45
TGZ02 84..106 ±1.5 nm
TGZ03 490..520 ±1%
TGZ04 900..1100 ±1%
TGZ11 1350..1650 ±1% 10
*The pitch value is given for information only, not for lateral calibration purposes.
Application

TGZ calibration gratings are intended for vertical calibration of SPM scanners. You can compensate for vertical non-linearity by using several calibration gratings with different nominal step heights.

For accurate quantification of images of calibration gratings from the TGZ series, you can use the calibration option in the Scanning Probe Image Processor (SPIP) designed by Image Metrology.
NIST certification and calibration

There are TGZ01, TGZ02, and TGZ03 NIST traceable gratings, which are individually controlled and certified. The height of the steps is measured with an AFM calibrated using the Step Height Reference Standards. The reference standards are three samples of ULTRASHARP gratings that were measured and certified by NIST (NIST Reports 821/261141-99 and 821/265166-01). Measurement and calibration techniques are based on NIST modified ISO step height determination algorithm (ISO5436).

Calibration gratings of the TGZ01, TGZ02, and TGZ03 series are also included in TGS01 and TGS02 sets. NIST traceable calibration gratings of the TGZ01, TGZ02, and TGZ03 series are available in TGS01C and TGS02C sets.

ORDERING

 
Single
TGZ01, 20 nm height View price
TGZ02, 100 nm height View price
TGZ03, 500 nm height View price
TGZ04, 1 µm height View price
TGZ11, 1.5µm height View price
 
Calibration set
TGS01 View price
TGS02 View price
TGS01, NIST-traceable View price
TGS02, TGZ are NIST-traceable View price
 
 

 

 

 

 
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