Lateral resolution down to
5 nm for scan size below 1 μm.
11 series
| XSC11, Cantilevers |
Resonance Frequency, kHz | Force Constant, N/m |
Length
l ± 5, µm |
Width
w ± 3, µm |
Thickness
t ± 0.5, µm |
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|---|---|---|---|---|---|---|---|---|---|
| min | typ | max | min | typ | max | ||||
| Cantilever A | 12 | 15 | 18 | 0.1 | 0.2 | 0.4 | 500 | 30 | 2.7 |
| Cantilever B | 60 | 80 | 100 | 1.1 | 2.7 | 5.6 | 210 | 30 | 2.7 |
| Cantilever C | 115 | 155 | 200 | 3 | 7 | 16 | 150 | 30 | 2.7 |
| Cantilever D | 250 | 350 | 465 | 17 | 42 | 90 | 100 | 50 | 2.7 |
Application
Each cantilever is similar with respect to resonance frequency and force constant to the cantilever of a very popular 1-lever product: HQ:CSC17, HQ:NSC18, HQ:NSC14 and HQ:NSC15. Probes with 4 different cantilevers in terms of resonance frequency and force constant allow on-the-fly selection or correction of the desired mode of operation. Measurement modes ranging from contact mode operation through force modulation and lift mode to tapping and noncontact mode are possible.
| Features 1-10 nm | Features > 10 nm | EFM | |
|---|---|---|---|
| HQ:XSC11/Al BS |
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| HQ:XSC11/No Al |
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| HQ:XSC11/Hard/Al BS |
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| HQ:XSC11/Pt |
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| HQ:DPE-XSC11 |
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| HQ:DPER-XSC11 |
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| HQ:DMD-XSC11 |
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ORDERING OPTIONS
Click on a product type below to order online.
LONG SCANNING
Accurate resolution of surface features larger than 10 nm in diameter. Good for scan sizes above 2 μm at 512 points.
