Lateral resolution down to
5 nm for scan size below 1 μm.
11 series
| XSC11, Cantilevers |
Resonance Frequency, kHz | Force Constant, N/m |
Length
l ± 5, µm |
Width
w ± 3, µm |
Thickness
t ± 0.5, µm |
||||
|---|---|---|---|---|---|---|---|---|---|
| min | typ | max | min | typ | max | ||||
| Cantilever A | 12 | 15 | 18 | 0.1 | 0.2 | 0.4 | 500 | 30 | 2.7 |
| Cantilever B | 60 | 80 | 100 | 1.1 | 2.7 | 5.6 | 210 | 30 | 2.7 |
| Cantilever C | 115 | 155 | 200 | 3 | 7 | 16 | 150 | 30 | 2.7 |
| Cantilever D | 250 | 350 | 465 | 17 | 42 | 90 | 100 | 50 | 2.7 |
| Features 1-10 nm | Features > 10 nm | EFM | |
|---|---|---|---|
| HQ:XSC11/Al BS |
|
||
| HQ:XSC11/No Al |
|
||
| HQ:XSC11/Hard/Al BS |
|
||
| HQ:XSC11/Pt |
|
||
| HQ:DPE-XSC11 |
|
||
| HQ:DPER-XSC11 |
|
ORDERING OPTIONS
Click on a product type below to order online.
LONG SCANNING
Accurate resolution of surface features larger than 10 nm in diameter. Good for scan sizes above 2 μm at 512 points.
