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HQ:DMD-XSC11

Probe

DMD probe tip close-up
  • 8 nm
  • 8 nm
  • < 250 nm
  • 40°
  • 12 - 18 µm
  • n-type silicon
  • 0.01 - 0.025 Ohm*cm
  • Conductive Diamond
  • Aluminum

Cantilever

SEM image of 4 cantilevers on
chip (XSC11 series)
Schematic drawing of 4 cantilevers on chip (XSC11 series)


DMD-XSC11,
Cantilevers		 Resonance Frequency, kHz Force Constant, N/m Length
l ± 5,
µm 		Width
w ± 3,
µm 		Thickness
t ± 0.5,
µm
min typ max min typ max
Cantilever A 15 18 22 0.25 0.5 1 500 30 2.7
Cantilever B 90 110 130 3.5 6.5 10 210 30 2.7
Cantilever C 170 210 250 10 18 30 150 30 2.7
Cantilever D 350 450 575 55 95 175 100 50 2.7
*The full cone angle may be less than 40° at the last 200 nm of the tip end.