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HQ:DMD-XSC11

DMD probe tip close-up

SEM image of 4 cantilevers on
chip (XSC11 series)

Schematic drawing of 4 cantilevers on chip (XSC11 series)

DMD-XSC11, Cantilevers	Resonance Frequency, kHz			Force Constant, N/m			Length l ± 5, µm	Width w ± 3, µm	Thickness t ± 0.5, µm
DMD-XSC11, Cantilevers	min	typ	max	min	typ	max	Length l ± 5, µm	Width w ± 3, µm	Thickness t ± 0.5, µm
Cantilever A	15	18	22	0.25	0.5	1	500	30	2.7
Cantilever B	90	110	130	3.5	6.5	10	210	30	2.7
Cantilever C	170	210	250	10	18	30	150	30	2.7
Cantilever D	350	450	575	55	95	175	100	50	2.7

*The full cone angle may be less than 40° at the last 200 nm of the tip end.