TEST STRUCTURES

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TGF11 Series

SEM image of a TGF grating
The TGF calibration gratings feature one-dimensional arrays of trapezoidal steps etched into a silicon substrate. The sidewalls of the structures are very smooth and planar surfaces with well-defined orientation formed by the (111) crystallographic planes in monocrystalline silicon. The sidewalls and the horizontal top surfaces form an angle of 54.74°.

Part number	Pitch		Edge angle	Active area, mm	Step height, µm*	Chip dimensions, mm
	Value, µm	Accuracy, µm
TGF11	10	0.1	54.74°	3x3	1.75	5 x 5 x 0.3

 
* Approximate value, not for vertical calibration purposes

Application

TGF11 grating can be used for the assessment of scanner nonlinearity in the vertical direction. Direct calibration of the lateral force can be obtained by analyzing the contact response measured on the flat and sloped facets. This can be done for the calibration of conventional Si probes or cantilevers with an attached colloidal particle with any radius of curvature up to 2 μm.
 

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