|Part number||Pitch||Edge radii, nm||Step height, µm*||Active area, mm||Chip dimensions, mm|
|Value, µm||Accuracy, µm|
|TGX||3||0.1||< 5||1||1 x 1||5 x 5 x 0.3|
* Approximate value, not for vertical calibration purposes
The TGX calibration gratings are intended for lateral calibration of SPM scanners. They can also be used for:
- detection of lateral non-linearity, hysteresis, creep, and cross-coupling effects
- determination of the tip aspect ratio
For accurate quantification of images of calibration gratings from the TGX series, we recommend using the Scanning Probe Image Processor (SPIP) designed by Image Metrology.