TEST STRUCTURES

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TGX Series

The silicon calibration grating from the TGX series is an array of square holes with sharp undercut edges formed by anisotropic etching along the (111) crystallographic planes of silicon. The typical radius of the edges is less than 5 nm.


Schematic of the TGX grating structures

Part number	Pitch		Edge radii, nm	Step height, µm*	Active area, mm	Chip dimensions, mm
	Value, µm	Accuracy, µm
TGX	3	0.1	< 5	1	1 x 1	5 x 5 x 0.3

* Approximate value, not for vertical calibration purposes

Application

The TGX calibration gratings are intended for lateral calibration of SPM scanners. They can also be used for:

• detection of lateral non-linearity, hysteresis, creep, and cross-coupling effects
• determination of the tip aspect ratio

For accurate quantification of images of calibration gratings from the TGX series, we recommend using the Scanning Probe Image Processor (SPIP) designed by Image Metrology.

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