Sample for characterization of tip shape with hard sharp pyramidal nanostructures. The radius of curvature of the sharpest edges is below 5 nm.
TEST STRUCTURES
TGXYZ series
Gratings with rectangular silicon oxide steps for vertical and lateral calibration of SPM.
TGXYZ01
20 nm step height
XYZ calibration standard
TGXYZ02
100 nm step height XYZ calibration standard
TGXYZ03
500 nm step height XYZ calibration standard
XYZ calibration standard
TGX Series
Silicon gratings with undercut edges for tip aspect ratio determination and lateral calibration of SPM.
TGX
3 µm pitch
HOPG
Highly ordered pyrolithic graphite with atomically flat areas on the surface.
ZYA
0.4° mosaic spread
ZYB
0.8° mosaic spread
ZYH
3.5° mosaic spread
