Test Structures

AFM tip evaluation sample with sharp pyramidal structures

AFM XYZ calibration grating, 20nm step height, 5µm and 10µm pitch arrays

AFM XYZ calibration grating, 100nm step height, 5µm and 10µm pitch arrays

AFM XYZ calibration grating, 500nm step height, 5µm and 10µm pitch arrays

AFM grating with undercut-edge structures anisotropically etched in silicon

AFM grating with trapezoid structures anisotropically etched in silicon

HOPG with mozaic spread value 0.4°±0.1°, double sided, 10×10*1mm or 10×10*2mm

HOPG with mozaic spread value 0.8°±0.2°, double sided, 10×10*1mm or 10×10*2mm

HOPG with mozaic spread value 3.5°±1.5°, double sided, 10×10*1mm or 10×10*2mm