TGF11

Slope Angle calibration Grating
SEM image of TGF11 grating

The TGF11 series of silicon calibration gratings is a 1-D array of trapezoidal steps with a 10 µm pitch and height of approximately 1.75 µm. The lateral faces of the steps have an inclination angle with respect to the horizontal plane of precisely arctan sqrt(2)=54.72°. This angle is defined by the crystallography of silicon and is maintained with high accuracy.
Schematic of TGF11 grating.
Part Number Pitch Step height*, µm Edge angle Active area, mm Chip dimensions, mm
Value, µm Accuracy
TGF11 10.0 ±0.25% 1.75 54?° 44' 3 x 3 5 x 5 x 0.45
*The step height value is given for information only, not for vertical calibration purposes.
Application

TGF11 grating can be used for the assessment of scanner nonlinearity in the vertical direction.

Direct calibration of the lateral force can be obtained by analyzing the contact response measured on the flat and sloped facets[1]. This can be done for the calibration of conventional Si probes or cantilevers with an attached colloidal particle with any radius of curvature up to 2 µm.

1. M. Varenberg, I. Etsion and G Halperin in Rev. Sci. Instrum., 74 (2003) 3362-3367.

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