HARD

PROBE

DLC coated probe tip close-up
  • 8 nm
  • 8 nm
  • < 20 nm
  • 40°
  • 12 - 18 µm
  • n-type silicon
  • 0.01 - 0.025 Ohm*cm
  • Hard Diamond-Like-Carbon
  • Aluminum
HARD probes feature a DLC wear-resistant coating that increases tip life. The tip shape is trihedral. The thin DLC coating offers enhanced tip durability without significant penalty on resolution.

1-cantilever series

Cantilever Resonance Frequency, kHz Force Constant, N/m
mintypicalmax mintypicalmax
14 series 110 160 220 1.8 5.0 13
15 series 265 325 410 20 40 80
16 series 170 190 210 30 45 70
17 series 10 13 17 0.06 0.18 0.40
18 series 60 75 90 1.2 2.8 5.5

3-cantilevers series

Cantilever Resonance Frequency, kHz Force Constant, N/m
mintypicalmax mintypicalmax
35 series Cantilever A 130 205 290 2.7 8.9 24
Cantilever B 185 300 430 4.8 16 44
Cantilever C 95 150 205 1.7 5.4 14
36 series Cantilever A 30 90 160 0.1 1.0 4.6
Cantilever B 45 130 240 0.2 2 9
Cantilever C 25 65 115 0.06 0.6 2.7

4-cantilevers series

Cantilever Resonance Frequency, kHz Force Constant, N/m
mintypicalmax mintypicalmax
11 series Cantilever A 12 15 18 0.1 0.2 0.4
Cantilever B 60 80 100 1.1 2.7 5.6
Cantilever C 115 155 200 3 7 16
Cantilever D 250 350 465 17 42 90
*The full cone angle may be less than 40° at the last 200 nm of the tip end.